Hartung-Gorre Verlag

Inh.: Dr. Renate Gorre

D-78465 Konstanz

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Series in Microelectronics

edited by       Wolfgang Fichtner,

Qiuting Huang

Andreas Schenk

Mathieu Maurice Luisier

Bernd Witzigmann

Vol. 130





Lorenzo Ciampolini,

Scanning Capacitance Microscope Imaging and Modelling.

2002. XVI, 162 pages.

ISBN 3-89649-788-X










This thesis deals with the modelling of an advanced characterization technique for semiconductor devices, the Scanning Capacitance Microscopy (SCM), a promising candidate for the quantitative analysis of sub-micron 2D dopant distributions, vital data for the Technology CAD engineer. The thesis describes accurately the experimental SCM technique and proposes an highly efficient technique for its modelling, which is based on device simulation. The model results are compared with experimental results.


Keywords: Scanning, Capacitance, Microscope, Imaging, Modelling, SCM


Series in Microelectronics

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Hartung-Gorre Verlag

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