Hartung-Gorre Verlag

Inh.: Dr. Renate Gorre

D-78465 Konstanz

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edited by  P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud


Vol. 1:

Philippe A. Passeraub,
An Integrated Inductive Proximity Sensor.
1999, 220 p., € 50,11. ISBN 3-89649-430-9




In this book, the possibility and the interest of integrating an inductive proximity sensor on a single chip is demonstrated. The first integrated inductive proximity sensor is presented. It is made of a single sensing flat coil with a simple electronic circuit interface integrated on the same substrate. High sensitivity and high performances have been achieved with this new device. Its fabrication uses CMOS standard processes and CMOS compatible post processes. The usefulness of this integrated proximity microsensor as a key component in new sensing and mechatronic applications is established.


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