Hartung-Gorre Verlag

Inh.: Dr. Renate Gorre

D-78465 Konstanz

Fon: +49 (0)7533 97227

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edited by  P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud



Vol. 12:

Christine Alépée


Technologies for


Silicon Microreactors.


2000, 216 pages, € 49,80.

ISBN 3-89649-635-2




Thanks to their characteristic high surface to volume ratios, chemical microreactors present many potential advantages compared to conventional reactors. However, research in this field is still in its infancy and many technological issues still have to be solved. This book addresses several of these issues considering the particular case of high-temperature silicon microreactors. It mainly presents a thorough study and comparison of Pt and polySi thin films for high-temperature resistive heating and temperature sensing applications and also addresses heat transfer and thermal behaviour questions that were studied via experimental measurements as well as numerical and analytical models..


Keywords: high surface to volume ratios, chemical microreactors, high-temperature silicon microreactors, Pt and polySi thin films, heat transfer, thermal behaviour.



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