Hartung-Gorre Verlag Inh.: Dr. Renate Gorre D-78465 Konstanz Fon: +49 (0)7533 97227 Fax: +49 (0)7533 97228 www.hartung-gorre.de

S

Series in MICROSYSTEMS

edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud

Vol. 2:

Andreas P. Friedrich,

Silicon Piezo-Tunneling Strain Sensor.

1999, 180 p., € 50,11. ISBN 3-89649-439-2

This book deals with the study, development and characterization of a new type of silicon integrated strain sensor based on the piezo-tunnel effect. The key element of the sensor is a heavily doped shallow lateral junction fabricated by a close-to-conventional CMOS technology. Besides the experimental work, a consistent theoretical model of the piezo-tunnel effect in silicon is presented. Both simulations and experiments clearly demonstrate the great potential of using such new piezo-tunneling strain sensors, especially in applications requiring high sensitivity and temperature independent characteristics.

Series in MICROSYSTEMS

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