Series in
MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 21:
Schahrazède Lila Mouaziz
Micro and
Nano Tools for Magnetic Field Imaging
2007,
XXIV, 154 p.; € 64,00. ISBN 3-86628-154-4
This book describes the
design, fabrication and characterisation of the micro and nano tools for
magnetic field imaging. A microfabrication technique has been developed to
produce hybrid devices consisting of micro-nano Hall sensors integrated on SU-8
cantilevers. Two materials have been used to produce the Hall sensors. First,
bismuth (Bi) was chosen for its low carrier charge density and its negligible
surface charge depletion effects. The second material tested was nickel (Ni),
chosen for the dominant effect called the extraordinary Hall effect. Bi
micro-Hall sensors have shown a fragility making them delicate to handle.
However, the Ni micro-Hall sensors had an excellent functionality. Their
characterization has shown sensors with a low sensitivity compensated by the
high applied current providing a high magnetic field resolution. The scanning
Hall probe microscopy (SHPM) allows images that were carried out using the Ni
micro-Hall sensors. The magnetic field resolution is better than 1 mT/Hz1/2,
a result comparable to the high resolution offered by the semiconductors. Also,
single crystal silicon cantilevers have been fabricated for use in the magnetic
resonance force microscopy (MRFM) experiments. Cantilevers with integrated
micro-magnets have been successfully produced. The production yield is higher
than 70%. The Rayleigh method adapted to the cantilevers geometry, made
possible the estimation of the theoretical resonance frequencies. The
calculated values fit well with the measured ones. All the cantilevers have a
quality factor above 20000 and the force sensitivity achieved was between 10-16
and 10-17 N/Hz1/2. The realized probes represent micro
and nano tools suitable for the magnetic field imaging that can be done with
the SHPM and MRFM techniques.
Schahrazède Lila Mouaziz was born in Oran -Algeria- in 1973. She studied
physics at the University of Es-Senia (Oran) and received a Diploma in advanced
studies in physics in 1995. She pursued her studies at the University of
Neuchâtel -Switzerland- and received the Diploma in physics (Masters) in 2001.
She then worked as a research assistant at the Institute of Applied Optics of
the Swiss Federal Institute of Technology (EPFL), Lausanne -Switzerland- in
collaboration with the Sensors, Actuators and Microsystems Laboratory of the
University of Neuchâtel and NanoWorld Innovative Technologies on the SU-8 AFM
cantilevers and hybrid nitride probes. Since 2003 she has joined the
Microsystems and Nanoengineering Laboratory of the Swiss Federal Institute of
Technology in Lausanne (EPFL). In 2007 she obtained her Ph.D. for her work on
the development of micro and nano tools for the magnetic microscopy.
Keywords: Micro Tools, Nano Tools, Magnetic Field Imaging,
hybrid devices, SU-8 cantilevers, Hall sensors
Direkt bestellen bei / to order directly
from: Hartung.Gorre@t-online.de