Series in
MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 22:
Johannes Antonius Jeroen Steen
Microfabricated
Electrically Conducting and Wear-Resistant
Nanoprobes for Scanning Probe Applications
2008,
180 p.; € 64,00. ISBN 3-86628-186-2
Conventional
metal-coated Si probes suffer from wear and melting at the tip extremity at
high current densities. The sensitivity to melting and wear is a serious
limitation, since the probes get disabled. This work addresses and resolves
these problems. The approach used is to fabricate full metal cantilevers with
integrated metal nanometrically sharp tip, using a probe material that has a
high hardness, a high melting temperature, a good electrical conduction and a good resistance to oxidation.
This book describes the design, microfabrication, characterisation including
benchmarking against conventional Si probes, and demonstrates applications of
the fabricated electrically conducting probes.
About
the author
Johannes Antonius Jeroen Steen
was born in Best, The Netherlands, in 1978. He received his M.Sc. degree in
Applied Physics in 2002 from the University of Twente, The Netherlands. With
his francophilic mind, he accepted the opportunity to start his Ph.D. in
Microtechnology at the Ecole Polytechnique Fédérale de Lausanne, Switzerland.
In the framework of his Ph.D. he spent the year 2006 in the Land of the Rising
Sun at the Institute of Industrial Science, University of Tokyo, Japan. Jeroen
received his Ph.D. degree in 2007 for his work on microfabricated electrically
conducting and wear-resistant nanoprobes.
Keywords: Micro
Tools, Nano Tools, oxidation, electrically
conducting probes
Direkt bestellen bei / to order directly from: Hartung.Gorre@t-online.de