Series in
MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
Vol. 23:
Özge Zorlu
Orthogonal Fluxgate Type Magnetic
Microsensors with Wide Linear Operation
Range
2008, XIV, 172 p.; € 64,00.
ISBN-10:
3-86628-198-6
ISBN-13:
978-3-86628-198-1
This book describes the development of microfabricated fluxgate
magnetometers for wide linear operation range. Fluxgate type magnetic sensors are
powerful devices due to their high sensitivity, low offset, and high
temperature stability of the offset. Unfortunately, their linear operation
range is limited, since an attempt to increase the linear range also increases
the power dissipation of the sensor for the traditionally used parallel
fluxgate configuration. In this study, microfabricated fluxgate sensors with
wide linear operation range and low power dissipation are developed with the
use of the orthogonal fluxgate configuration and a closed magnetization path
for the excitation. The development, fabrication, and characterization of three
different fluxgate sensor structures are described in the book. The sensor
structures are named as: rod type orthogonal macro fluxgate sensor, rod type
orthogonal micro fluxgate sensor, and ring type micro fluxgate sensor. All of
the structures have a CMOS compatible fabrication process flow. Furthermore,
the rod type micro sensor and the ring type micro sensor are fabricated by
using only standard thin film deposition and photolithography techniques,
enabling batch fabrication of these sensor structures. All of the structures
use planar sensing coils and an electroplated FeNi core. Apart from the design
and development of the sensor, the FeNi electroplating process is intensively
investigated since this process directly affects the performance of the
sensors.
Özge Zorlu was born in Zonguldak, Turkey, in 1978. He received his B.Sc. and M.Sc.
degrees from the Middle East Technical University, Department of Electrical and
Electronics Engineering, Ankara, Turkey in 2000 and 2002, respectively. He
worked as a research and teaching assistant in the same department between 2000
and 2003. He then joined the Institute of Microelectronics and Microsystems at
the École Polytechnique Fédérale de Lausanne (EPFL), Switzerland, as a research
and teaching assistant. In 2008, he obtained his PhD degree for his work on
microfabricated fluxgate magnetometers for wide linear operation range. His
research interests include microfabricated and CMOS-compatible sensor design,
microfabrication technologies, and process development.
Keywords: magnetic
sensor, orthogonal fluxgate, wide linear range, microfabrication, electroplated
FeNi, CMOS compatible, low power.
Direkt bestellen bei / to order directly from: Hartung.Gorre@t-online.de