Hartung-Gorre Verlag
Inh.: Dr.
Renate Gorre D-78465
Konstanz Fon:
+49 (0)7533 97227 Fax: +49 (0)7533 97228 www.hartung-gorre.de
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Series in MICROSYSTEMS
edited by P. A. Besse,
J. Brugger,
M. Gijs,
R. S. Popovic,
Ph. Renaud
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Vol. 8: Dragan Manic Drift in Silicon Integrated Sensors and Circuits due to Thermo-Mechanical Stresses 2000, 184 pages, € 49,80 ISBN 3-89649-591-7 |
This book
deals with drift problems in integrated sensors (ISs) and circuits (ICs) due to
thermo-mechanical stress drift. Using sensitive piezo-resistance and piezo-Hall
based test devices thermo-mechanical stress drift is studied. The stress drift
is due to plastic or viscoelastic behavior of the
materials used in the wafer processing or packaging. For the first time, to our
knowledge, Hall elements have been used as the stability test devices. The main
advantage of Hall elements is their low temperature cross-sensitivity, which
increases the measurement accuracy. The most severe drift caused by the
thermo-mechanical stress is observed in plastic packages. For example, the
sensitivity drift of the Hall elements packaged in conventional TSSOP and SOP
packages after temperature cycling, humidity testing or after reflow soldering
is up to 2%. To minimize the effects of the thermo-mechanical stress and
increase stability of integrated sensors or circuits
performance, some stability strategies are suggested.
Keywords: drift problems, integrated
sensors (ISs), integrated circuits (ICs), thermo-mechanical stress drift, stability of ISs or ICs.
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Hartung-Gorre
Verlag / D-78465 Konstanz / Germany
Telefon: +49 (0) 7533 97227 Telefax: +49 (0) 7533 97228
http://www.hartung-gorre.de eMail: verlag@hartung-gorre.de