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Series in Microelectronics

edited by       Wolfgang Fichtner
                        Qiuting Huang
                        Heinz Jäckel
                        Gerhard Tröster
                        Bernd Witzigmann

Vol. 194




Luca Sponton,
From manufacturing variability to process-aware circuit simulation.
2009, 162 pages. € 64,00. ISBN 3-86628-230-3 and 978-3-86628-230-8



Various sources of variability affect semiconductor manufacturing processes. This work presents modeling approaches that help to analyze these fluctuations in order to counter them by delivering robust designs to the foundry. The first part introduces the methodology used to implement the information transfer from the analysis of process variations to the stage of circuit design. In the second part, a robust three-dimensional parametric transistor model has been devised to study quantitatively the impact of process fluctuations. Finally, the first process-aware SPICE model generated from three-dimensional simulations is presented. This model allows the analysis of the effects of process variability, including process-geometry interactions, at the circuit level.

About the Author:
Luca Sponton received the Laurea cum Laude in electrical engineering in 2000 from the University of Padova, Italy.

In the same year he joined STMicroelectronics in Milano, Italy, as a Process Development Engineer, working on the development of ESD protection structures and circuits for smart-power processes.

In 2004 he joined the Integrated System Laboratory at the Swiss Federal Institute of Technology (ETH) in Zurich, Switzerland, as a research assistant. His main research interests are in the field of numerical simulation of semiconductor process and devices and Design For Manufacturing. In September 2007 he joined Synopsys Switzerland.


Keywords: Design for Manufacturing, TCAD, Semiconductor devices, Process Simulation, 3D simulation, LER

Series in Microelectronics

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