Hartung-Gorre Verlag

Inh.: Dr. Renate Gorre

D-78465 Konstanz

Fon: +49 (0)7533 97227

Fax: +49 (0)7533 97228



Series in Microelectronics

edited by       Wolfgang Fichtner
                        Qiuting Huang
                        Heinz Jäckel
                        Hans Melchior
                        George S. Moschytz
                        Gerhard Tröster

Vol. 97







Luis Villablanca


Mesh Generation Algorithms

for Three-Dimensional

Semiconductor Process Simulation.


2000. VIII, 104 pages. € 49,80

ISBN 3-89649-583-6













This dissertation describes a set of algorithms that can be used to generate finite element meshes for three-dimensional semiconductor process simulation.

The first contribution is the description of a new type of mesh which is suitable for the Box Method. This description is combined with an algorithm that can be used to convert any mesh into a Box Method conforming mesh.

Additionally, a new algorithm is described, which is able to handle the changes of the material boundaries during process steps like deposition and etching. Finally, a technique is described which can be used to improve the numerical stability of the algorithms computing geometric expressions.




Series in Microelectronics

Direkt bestellen bei / to order directly from:

Hartung-Gorre Verlag / D-78465 Konstanz / Germany

Telefon: +49 (0) 7533 97227  Telefax: +49 (0) 7533 97228
http://www.hartung-gorre.de   eMail: verlag@hartung-gorre.de